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產(chǎn)品目錄

工藝氣體元件

減壓閥（壓力調(diào)節(jié)器）／背壓閥　一般氣體用 AK/BP

    ?從半導(dǎo)體到一般行業(yè)都可使用的標(biāo)準(zhǔn)型。
    ?主體材質(zhì)可根據(jù)流體選擇SUS316或黃銅。
系列型號(hào)用途主體材質(zhì)配管連接配管尺寸
AK一段式氣路用SUS316
或黃銅		NPT內(nèi)螺紋
卡套式接頭		1/4''，3/8''
1/2''
AK一段式一次側(cè)高壓用SUS316
或黃銅		NPT內(nèi)螺紋
卡套式接頭		1/4''，3/8''
1/2''
AK一段式負(fù)壓調(diào)節(jié)SUS316
或黃銅		NPT內(nèi)螺紋
卡套式接頭		1/4''，3/8''
1/2''
AK二段式一次側(cè)高壓用SUS316
或黃銅		NPT內(nèi)螺紋
卡套式接頭		1/4''
BP背壓閥―SUS316
或黃銅		NPT內(nèi)螺紋
卡套式接頭		1/4''

產(chǎn)品特點(diǎn)

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.

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