產(chǎn)品信息 ?
產(chǎn)品目錄
? 工藝氣體元件（特氣閥）
? 工藝氣體用元件
工藝氣體用元件
單向閥／真空發(fā)生器／流量開關(guān) AP
-
［單向閥］
?防止背壓使流體逆流。
?構(gòu)造簡單，內(nèi)部的可動零部件僅為O形圈。
?采用無彈簧的構(gòu)造，可減少因震顫等產(chǎn)生的顆粒，降低下游的壓力變動。
［真空發(fā)生器］
?真空發(fā)生器。
?用于更換氣罐時(shí)，排出配管中殘余的氣體。
［流量開關(guān)］
?檢測配管破裂等造成的過剩流量。
| 系列 | 形式 | 主體材質(zhì) | 配管連接 | 配管尺寸 |
|---|---|---|---|---|
| AP | 單向閥 | SUS316L二次熔煉 | 面密封接頭 管子焊接 | 1/4''，3/8'' |
| AP | 真空發(fā)生器 | SUS316L | 面密封接頭 管子焊接 | 1/4''，3/8'' |
| AP | 流量開關(guān) | SUS316L二次熔煉 SUS316L | 面密封接頭 管子焊接 | 1/2''，3/4'' |
產(chǎn)品特點(diǎn)
■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.
